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Semiconductor:
Intelligent Remote Facility Management Solution

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Semiconductor manufacturing is characterized by complex process flows made up of many individual steps. From wafer fabrication and sorting, to assembly, testing, and shipment, many of these process steps have very close tolerances.

Advantech's intelligent remote facility management product portfolios serve data acquisition, machine condition monitoring, and device management requirements. They effectively sense, collect, and manage data from devices at remote sites. And, with Advantech's connectivity solutions such as switches, routers, and gateways, information can be successfully transmitted to servers to perform further analysis using SCADA software such as WebAccess/SCADA for supervisory control, data analysis and visualization.

These comprehensive solutions from field to cloud ensure machine efficiency, stability, and scalability. They help improve product quality, as well as management capabilities for semiconductor manufacturers and equipment builders.

Intelligent Remote Facility Management Product Features
Power over Ethernet (PoE)

Manage Remote and Distributed Stations

Construct a sensing network with customized device name labels in a centralized management system for equipment in remote sites.

Power over Ethernet (PoE)

Versatile Data Acquisition Interfaces

Acquire data from sensors, meters, and equipment through RS-485 I/O, Ethernet I/O, wireless I/O or high speed PCIe cards commonly used in industrial IoT.

Power over Ethernet (PoE)

Machine Condition Monitoring

Effectively monitor IoT facilities, environments, and industrial processes to improve machine efficiency, management capabilities, as well as staff safety.

Power over Ethernet (PoE)

Wired and Wireless for All Conditions

Supports varous wired and wireless interfaces and protocols for flexible use in different networking environments.

Power over Ethernet (PoE)

Field-proven in Multiple Applications

Fulfill versatile requirements from different applications in the semiconductor industry.

Power over Ethernet (PoE)

Integrated Hardware and Software Solution

Advantech software such as DeviceOn/BI, DAQNavi, and WebAccess/SCADA provide comprehensive remote facility management and control for wired and wireless hardware I/O, PCIe cards, switches, and gateways.

LoRaWAN Wireless Solution Enables Facility Monitoring

Compressed clean dry air (CDA) is employed in fabs to power pneumatic components of manufacturing equipment, control valves, or to clean materials and equipment. To smooth the manufacturing process, CDA systems must be carefully monitored by maintenance teams.

Advantech offers a plug and play, remote facility monitoring and inspection LoRaWAN wireless solution comprising WISE-2410 vibration sensor for compressor inspection, and WISE-4610 LoRaWAN I/O module with its WISE-S617 flexible I/O for environment and facility current/power monitoring.

Remote I/O Solution Facilitates
Machine Data Acquisition and Analysis

In the well-established manufacturing processes of the semiconductor industry, robots and CVD/PVD machines can be commonly seen. Robots quickly move wafers from different production lines to increase the production yield and CVD/PVD machines are used to form a thin film on wafers. To capture data from these machines, the industry needs advanced data acquisition and analysis capabilities to boost continuous machine operation and production yields.

Advantech industrial remote I/O modules such as ADAM-6217, and EKI- 2728 switches effectively capture key parameters via Ethernet and simultaneously transmit data to VM servers for analysis, which helps improve semiconductor management, machine efficiency, and production stability.

Machine Vison Solution Ensures Inspection for Wafer Surface Purity and Planarity

Wafer surface damage and scratch defects need to be located during the CMP (chemical mechanical planarization) process to ensure wafer surface purity and planarity.

Advantech offers a machine vision inspection solution covering industrial-grade image sensors, high-level computing industrial PC IPC-220, frame grabber card PCIE-1674E-AE, industrial cameras, and the VisionNavi application software to deliver precise and efficient semiconductor production.

LoRaWAN Wireless Sensing and Communication Allows Remote Inspection

Many hazardous chemicals are used in high-tech industries such as semiconductor manufacturing. Not only are these chemicals dangerous and polluting, their waste disposal is challenging to manage.

Industrial waste disposal systems usually have a high number of inspection check points high up in chimneys to disperse fumes. Advantech's LoraWAN wireless IoT sensing devices, WISE-6610 and WISE-2410, can automatically and remotely monitor systems, making them a perfect facility monitoring solution for waste disposal systems.

Data Acquisition & Communication Empowers Equipment Test and Measurement

Wafer testing is a crucial step during semiconductor device fabrication. It is performed by wafer prober machines, which are needed to precisely measure electrical characteristics.

High intensity digital I/O devices, such as Advantech PCIE-1753, are used to control peripheral switches/devices that can precisely position the wafer. PCIE-1812 and PCIE-1824 met wafer testing needs for analog output to accurately measure electrical characteristics of each wafer.

And with Advantech’s comprehensive data acquisition devices and DAQNavi software development kit, customers could effectively control costs and shorten times for building wafer testing machines.

LoRaWAN Wireless Solution Enables Facility Monitoring on Compressed Clean Dry Air (CDA) System

Advantech's LoRaWAN wireless solution includes WISE-2410 vibration sensor, WISE-4610 wireless I/O module, and WISE-S617 flexible I/O for compressor inspection, environment and facility current/power monitoring on CDA systems in Taiwan semiconductor manufacturing fabs.

It is an easy, reliable, and cost effective private LoRaWAN network solution for different kinds of facility monitoring applications in the semiconductor industry.

Remote I/O Solution Facilitates Data Acquisition and Analysis for Robots and Equipment

A leading semiconductor company in Taiwan adopted Advantech's ADAM-6217 industrial remote I/O modules and EKI-2728 switch for robots and CVD/PVD machine data acquisition and analysis. The collaboration improved management capabilities, machine efficiency, stability, and scalability.

Machine Vison Solution Ensures Inspection for Wafer Surface Purity and Planarity

Advantech’s machine vision edge solution was installed as the CMP system which included CMP machinery, robotic handling system, a vision inspection system, and uplink data for the IT database.

Our machine vision inspection system integrates the global shutter, high speed industrial cameras, a multi-channel computing platform, and VisionNavi software designed with a graphical and flowchart-based interface, where users can easily deploy the vision inspection applications without any programming skills.

LoRaWAN Wireless Solution Allows Remote Inspection for Water Plant Waste Disposal

One renowned semiconductor manufacturer in Taiwan leveraged Advantech's WISE-6610 and WISE-2410 LoRaWAN wireless IoT sensing devices to automatically and remotely monitor waste disposal systems which had inspection check points high up in chimneys. This meant they were able to reduce the risks to maintenance staff.

Data Acquisition & Communication Empowers Wafer Probing Equipment

Advantech's PCIE-1753, PCIE-1812, and PCIE-1824 data acquisition (DAQ) devices empowered a water probing equipment builder in Taiwan to control up to 96 peripheral limited switches/devices. This helped them accurately measure electrical characteristics of each wafer via analog output.

With these advanced DAQ devices and DAQNavi software development kit, customers can effectively control costs and shorten time for building wafer testing machines.

Hardware Product Offerings

ICR-4453

Ultra High-Speed 5G Router & Edge Computing Gateway

ICR-4453

WISE-4610

LoRaWAN IoT Wireless Modular I/O

WISE-4610

WISE-2410

LoRaWAN Wireless Vibration Sensor

WISE-2410

ADAM-6217

8AI IoT Modbus/SNMP/MQTT 2Ports Ethernet Remote I/O

ADAM-6217

WISE-6610

Hardened LoRaWAN 8-Channel Cellular Gateway

WISE-6610

PCIE-1812

250 kS/s per channel, 16-bit, 8-ch AI Multifunction PCIE Card

PCIE-1812

PCIE-1753

96-ch Digital I/O PCIE Card

PCIE-1753

EKI-2728

8GE Unmanaged Ethernet Switch

EKI-2728

ACP-4340

4U Rackmount Chassis

ACP-4340

AIMB-787

Industrial ATX Motherboards | 10th Gen Intel® Core™ i9/i7/i5/i3 Pentium®/ Celeron® Processor

AIMB-787

MIC-770 V2

Modular IPC | Compact Fanless System with 10th Gen Intel® Xeon®/Core™ i CPU Socket

MIC-770 V2

MIC-75G20

Modular IPC | MIC-75G20 GPU i-Module, 1 PCIe x16 + 1 PCIe x4, dual front accessible storage bay

MIC-75G20

Software Product Offerings
Device management for sensing modules and platforms

DeviceOn/BI

Device management for sensing modules and platforms

Machine condition monitoring

DAQNavi

Machine condition monitoring

Device management for sensing modules and platforms

WebAccess/SCADA

Device management for sensing modules and platforms

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Industrial Equipment Manufacturing Success Cases

Industrial Equipment Manufacturing Success Cases

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Semiconductor Solutions Sales Kit

Find out what semiconductor remote facility management solutions Advantech has to offer!

- Industry Overview
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